Searches for "euv etf" are up 2,000% over the past 30 days. That is not a typo. The query went from near-zero volume to a genuine search trend almost overnight, and the reason is straightforward: ASML Holding, the Dutch company with a near-monopoly on extreme ultraviolet lithography machines, has been in the news constantly as the linchpin of the global AI chip supply chain.
The short answer to "where is the EUV ETF?" is: there isn't one. No fund is built specifically around EUV technology or ASML. But ASML sits inside several semiconductor ETFs at very different weights, and knowing which one gives you the most concentrated ASML exposure is the actually useful answer here.
What EUV Is and Why It Matters Right Now
Extreme ultraviolet lithography is the manufacturing process used to etch the smallest transistors onto modern chips. Every leading-edge chip — Nvidia's H100, Apple's M-series, AMD's Ryzen — is made on EUV machines. ASML makes essentially all of them. The company has no credible competitor for high-NA EUV, which is the next generation of the technology required to produce chips at 2nm and below.
The AI buildout has made this monopoly more visible. Every data center GPU Nvidia ships requires EUV-manufactured chips. TSMC, Samsung, and Intel's foundry all depend on ASML machines to make them. The US and Dutch governments have restricted ASML from selling its most advanced machines to China, which has made the company a geopolitical flashpoint alongside a technology one. Search interest follows news flow, and ASML has been in the news nearly every week in 2026.
ASML shipped 44 EUV systems in 2023 at an average selling price of roughly 200 million euros each. High-NA EUV machines, the next generation, sell for approximately 380 million euros per unit. There is no substitute for this equipment at leading-edge process nodes. The backlog runs years.
Where ASML Lives Inside Semiconductor ETFs
ASML is headquartered in the Netherlands and listed on both Nasdaq (ASML) and Euronext Amsterdam. Because it trades on Nasdaq, US-listed semiconductor ETFs with global mandates include it. US-only funds do not.
| ETF | ASML Weight | Geographic scope | Expense ratio | Focus |
|---|---|---|---|---|
| SMH | ~11% | Global (includes non-US) | 0.35% | Top 26 global semiconductor companies |
| SOXX | 0% | US only | 0.35% | US-listed semiconductor companies |
| XLK | 0% | US S&P 500 only | 0.09% | S&P 500 Information Technology sector |
| VGT | 0% | US only | 0.10% | US IT sector companies |
| QQQ | ~1.5% | Nasdaq-listed (ASML trades on Nasdaq) | 0.20% | Nasdaq-100 largest non-financial companies |
The practical answer is SMH. It holds ASML at roughly 11% weight, the highest ASML concentration of any major US-listed semiconductor ETF. ASML is consistently one of SMH's top 3 holdings alongside Nvidia and TSMC, reflecting its importance to the global chip supply chain.
SOXX, XLK, and VGT hold zero ASML because they restrict their mandate to US-domiciled or US-listed companies on specific exchanges, and ASML's primary domicile is the Netherlands. QQQ holds a small ASML position because ASML does trade on Nasdaq, but at roughly 1.5% it is a minor exposure.
Direct vs. ETF: The Case for Buying ASML Directly
If your thesis is specifically on ASML and the EUV monopoly, buying ASML shares directly gives you 100% of that exposure at no fund expense ratio. ASML trades on Nasdaq under the ticker ASML, with high liquidity and no currency conversion required for US investors since the US-listed shares trade in dollars as ADRs.
The case for SMH over direct ASML: you want the broader semiconductor theme, not just the equipment layer. ASML is the bottleneck for chip production, but Nvidia designs the chips, TSMC manufactures them, and Micron makes the memory they need. SMH gives you the full supply chain in one fund at 0.35%. If you only want the EUV exposure, ASML stock is the more direct expression.
The BFF Take
The 2,000% spike in "euv etf" searches is real demand for something that does not exist yet. ASML is a genuinely extraordinary company with a durable competitive position — the combination of physics-based complexity, equipment maintenance contracts, and export restrictions on advanced EUV makes this moat unusually wide.
The way to express that thesis through an ETF is SMH, where ASML sits at roughly 11% of the portfolio alongside Nvidia, TSMC, and the rest of the semiconductor supply chain. If you want the clean single-company bet on EUV specifically, ASML stock. If you want the full semiconductor thesis with meaningful ASML exposure built in, SMH at 0.35%.
EUV Exposure: Your Options
- No EUV ETF exists. Demand is real; the product is not.
- SMH (VanEck Semiconductor ETF) holds ASML at roughly 11%, the highest weight of any major US semiconductor ETF.
- SOXX, XLK, and VGT hold zero ASML because they restrict to US-domiciled companies.
- QQQ holds a small ASML position (~1.5%) because ASML trades on Nasdaq.
- For maximum EUV exposure: buy ASML stock directly. For broad semiconductor exposure with ASML included: SMH.